NAKATA Yukihiko
   Department     College of International Management
   Position   Visiting Professor
Language English
Publication Date 2004/12
Type Research paper (Academic/Professional Journal)
Peer Review Peer reviewed
Title Irradiation Damage in SiO2/Si System Induced by Photon and/or Ions in Photo-Oxidation and Plasma-Oxidation
Contribution Type Joint Work
Journal Japanese Journal of Applied Physics
Volume, Issue, Page 43(12),pp.8002-8006