NAKATA Yukihiko
   Department     College of International Management
   Position   Visiting Professor
Language English
Publication Date 2004/05
Type Research paper (Academic/Professional Journal)
Peer Review Peer reviewed
Title X-ray photoelectron spectroscopy study on SiO2/Si interface structures formed by three kinds of atomic oxygen at 300 °C
Contribution Type Joint Work
Journal Applied Physics Letters
Volume, Issue, Page 84(19),pp.3756-3758