NAKATA Yukihiko
   Department     College of International Management
   Position   Visiting Professor
Language English
Publication Date 2003/11
Type Research paper (Academic/Professional Journal)
Peer Review Peer reviewed
Title Surface Wave Plasma Oxidation at low Temperature under Rare Gas Dilution
Contribution Type Single Work
Journal Japanese Journal of Applied Physics
Volume, Issue, Page 42(11),pp.7033-7038
Details Part 1