NAKATA Yukihiko
   Department     College of International Management
   Position   Visiting Professor
Language English
Publication Date 2002/11
Type Research paper (Academic/Professional Journal)
Peer Review Peer reviewed
Title Low Temperature Gate Insulator for Poly-Si TFTs by Combination of Photo-Oxidation and PECVD using TEOS and O2 Gases
Contribution Type Joint Work
Journal Transaction of Institute of Electronics, Information and Communication Engineers (Special Issue on Electronic Display)
Volume, Issue, Page E85-C(11),pp.1849-1853